CAPABILITY:

• 3D Laser Scanning Confocal Microscope : 408nm violet laser
• Magnification : up to 28800x
• FOV : 11µm to 5400µm
• Resolution : 0.5 nm (height), 1nm (width)
• Accuracy : 0.2+L/100µm (height), ±2% (width)
• Linear scale (height) : 0.5nm
• XY stage operating range : 100×100 mm
• Capture resolution (max) : 3072×2304
• High-sensitivity 16-bit photomultiplier
• Highly-accurate 3D measurement data
• Steep angle measurements
• Fully-automatic measurement (AI-scan)
• Automated Analysis tool
  • Edge detection, multiple surfaces
  • Positions with detection functions
  • Quantification and comparative functions