CAPABILITY:

Resolution: 1.5 nm at 30 kV and at 8mm WD

Magnification: 10X to 500 000X

Probe current:: 10-12 to 10-10 A

Electron gun:  Cold-cathode field emission

Detectors: Scintillator/photomultiplier

GW Electronic System 47 backscattered detector

Accelerating Voltage: 500V to 30kV

Specimen Stage:    Type: Fully Eucentric goniometer stage

Movements: X = 100mm

Y = 110mm

Z = 34mm

Tilt: -5˚to 60˚

Rotation: 360˚ endless

Specimen exchange:  By airlock: Up to 150mm dia. Specimen holders

By stage drawout: 200mm dia. or larger specimen holders

EDS Detector: Si(Li) (30mm2) Prism 2000 with Imix acquisition system allowing Be detection

EBSD detector: Oxford HKL allowing crystallographic orientation