CAPABILITY:  

Resolution: 5nm at 0.2 kV and at 2mm WD

2.5nm at 1 kV and at 2mm WD

1.5nm at 10 kV and at 2mm WD

1nm at 20 kV and at 2mm WD

Magnification: 20X to 900 000X

Probe current:: 4pA to 10nA

Electron gun:  Thermal field emission

Detectors: In-Lens: Annular type

External: E-T Type mounted in chamber

Robinson Backscattered Electron Detector

Accelerating Voltage: 200V to 30kV

Specimen Stage:    Type: 6 axis fully Eucentric

Movements: X = 153mm

Y = 153mm

Z’ = 10mm

Z = 43mm

Tilt : -15˚to 65˚

Rotation : 360˚ continuous

Specimen Exchange Airlock Size : 210mm x 50mm

Specimen Chamber:  Inside diameter: 520mm

Height:: 300mm

EDS Detector: Si(Li) (30mm²) Prism 2000 with Imix acquisition system allowing Be detection