Packaging assembly laboratory / Others / Chemical stripper and DI water rinse
Wafer Process Systems WPS-600-FA-SS
Supplier :
Model :
Purpose :
Chemical stripper and DI water rinse
CAPABILITY:
MultiMEGTM Megasonic generator: 2 central frequencies available (430kHz or 1.3MHz) with a sweep of 1% around the central frequency at 2.5-3.5kHz. Maximum output power = 120W.
Chemical stripper tank has a capacity of 40l. Heating element in the tank can increase the temperature of chemical up to 90°C.
Rinse tanks have each a capacity of 40l. Can be operated in spray (tank#2 only) or soak (tank#1 and #2) mode.
Dryer tank: air or N2 can be used. Maximum operating temperature = 100°C
Touchscreen interface allows user to control all operations (open/close valves; activate/deactivate pumps, Megasonic, etc.)
All wet bench components made in stainless steel and Teflon.