CAPABILITY: Process chamber: Material Aluminum Volume 91 liters Inner dim. 450 x 450 x 450 mm ( H x W
CAPABILITY: Semi-Automatic equipment Automatic alignment of substrate position and dispense Manually load/unload substrate on the dispense stage Substrate: min size
CAPABILITY Working volume 21’’ H x 14.5’’ W x 27 ‘’D 9 quartz shelves in the chamber Electrode on chamber
- 1
- 2